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Occupational Safety and Health Administration OSHA

Inspection Detail



Accident Investigation Summary
Summary Nr: 14299457 Event: 12/17/1985Employee Inhales To Toxic Gas
Employee #1 was about 5 to 10 feet away from a leak that occurred during the installation of silicon tetra fluoride gas to the plasma enhanced chemical vapor deposition system. The gas seeped through the connection between the shut-off valve and the regulator because of stripped threads on the pipe nipple. It was dissipated throughout the room toward Employee #1 by a cooling fan on an instrument behind the leak. The fan was blowing air past the cylinder. Employee #1 inhaled some of the toxic gas and complained of a burning sensation in his throat and chest. He was taken to the hospital for examination.
Keywords: chest, leak, throat, installing, inadequate maint, work rules, inhalation, toxic fumes, accidental discharge
Inspection Degree Nature Occupation
1 2854651 Hospitalized injury Other Occupation not reported

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