Inspection Detail

Inspection: 312678048 - Cymer Inc

Inspection Information - Office: San Diego District Office

Inspection Nr: 312678048

Report ID: 0950632

Date Opened: 05/04/2009

Site Address:
Cymer Inc
17082 Thornmint
San Diego, CA 92127

Mailing Address:
, , 00000

Union Status: NonUnion

SIC:3999

NAICS: 339999/All Other Miscellaneous Manufacturing

Inspection Type: Accident

Scope: Partial

Advanced Notice: N

Ownership: Private

Safety/Health: Safety

Close Conference: 06/04/2009

Emphasis:

Case Closed: 01/13/2010

Related Activity
Type	Activity Nr	Safety	Health
Accident	101076420

Violation Summary
Violations/Penalties	Serious	Willful	Repeat	Other	Unclass	Total
Initial Violations				1		1
Current Violations				1		1
Initial Penalty	$0	$0	$0	$450	$0	$450
Current Penalty	$0	$0	$0	$450	$0	$450
FTA Penalty	$0	$0	$0	$0	$0	$0

Violation Items
#	Citation ID	Citaton Type	Standard Cited	Issuance Date	Abatement Due Date	Current Penalty	Initial Penalty	FTA Penalty	Contest	Latest Event	Note
1.	01001	Other	3203 A	10/27/2009	11/19/2009	$450	$450	$0		-

Investigation Summary

Investigation Nr: 201073855

Event: 04/30/2009

Employee Injures Both Eyes from Equipment Explosion

At approximately 7:00 p.m. on April 30, 2009, Employee #1 was working on an advanced prototype tool identified as a EUV (Extreme Ultra Violet) tool, which is manufactured by Cymer Incorporation. The EUV tool was an experimental prototype machine that etches microchips with concentrated ultra violet lasers. As Employee #1 observed the hydrogen gas ignited within the vacuum chamber, an explosion occurred that shattered the chamber components and silicon wafer. Fragments were ejected from the chamber, striking both eyes of Employee #1. He was transported to a medical center, where he received treatment and was hospitalized for over 24 hours. From the accident, he sustained permanent scarring in both eyes and may have his left eye surgically removed.

Keywords: EYE, EQUIPMENT FAILURE, EXPLOSION, STRUCK BY, FLYING OBJECT

Investigated Inspection
#	Inspection	Age	Sex	Degree of Injury	Nature of Injury	Occupation
1	312678048			Hospitalized injury	Foreign Body Ineye	Physical scientists, n.e.c.

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