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Inspection Detail
Inspection: 1523499.015 - Mattson Technology, Inc.
Inspection Information - Office: Fremont District Office
Site Address:
Mattson Technology, Inc.
47131 Bayside Parkway
Fremont, CA 94538
Mailing Address:
47131 Bayside Parkway, Fremont, CA 94538
Union Status: NonUnion
SIC:
NAICS: 334413/Semiconductor and Related Device Manufacturing
Inspection Type: Accident
Scope: Partial
Advanced Notice: N
Ownership: Private
Safety/Health: Safety
Close Conference: 09/09/2021
Emphasis:
Case Closed: 11/14/2022
| Type | Activity Nr | Safety | Health |
|---|---|---|---|
| Accident | 1752498 |
| Violations/Penalties | Serious | Willful | Repeat | Other | Unclass | Total |
|---|---|---|---|---|---|---|
| Initial Violations | 2 | 2 | 4 | |||
| Current Violations | 1 | 2 | 3 | |||
| Initial Penalty | $36,000 | $0 | $0 | $1,120 | $0 | $37,120 |
| Current Penalty | $18,000 | $0 | $0 | $1,120 | $0 | $19,120 |
| FTA Penalty | $0 | $0 | $0 | $0 | $0 | $0 |
| # | Citation ID | Citaton Type | Standard Cited | Issuance Date | Abatement Due Date | Current Penalty | Initial Penalty | FTA Penalty | Contest | Latest Event | Note |
|---|---|---|---|---|---|---|---|---|---|---|---|
| 1. | 01001 | Other | 3203(A) | 09/10/2021 | $560 | $560 | $0 | 01/09/2022 | O - Administrative Law Judge Order | ||
| 2. | 01002 | Other | 3314(L) | 09/10/2021 | $560 | $560 | $0 | 01/09/2022 | O - Administrative Law Judge Order | ||
| 3. | 02001 | Serious | 3314(C) | 09/10/2021 | $0 | $18,000 | $0 | 01/09/2022 | O - Administrative Law Judge Order | Citation has been deleted. | |
| 4. | 03001 | Serious | 3328(G) | 09/10/2021 | $18,000 | $18,000 | $0 | 01/09/2022 | O - Administrative Law Judge Order |
Investigation Summary
At 9:30 p.m. on March 31, 2021, an employee was in the clean room testing area, testing a Novkya A serial number MNVA-5. The machine failed testing at process module 1, the employee stood next to the process module 1 on the gas box bay platform. The employee operated the two hand switches to open the chamber lid and the lid began to open. The employee saw a particle atop of the electrostatic chuck and pointed it out to his coworker. The chamber lid was two-third. When the chamber lid of process module 1 was opening the injured employee saw a particle on top of the electrostatic chuck. The clevis was not threaded completely to the pneumatic cylinder and when the chamber lid was being lifted by the pneumatic cylinder, the clevis detached and the 400 pound chamber lid fell and crushed the employee's left index finger. The employee's finger was surgically amputated at the middle of the knuckle, and the employee was hospitalized.
Keywords: Crushed, Crushing, Falling Object, Finger, Lid, Surgical Amputation, Testing, Testing Lab
| # | Inspection | Age | Sex | Degree of Injury | Nature of Injury | Occupation |
|---|---|---|---|---|---|---|
| 1 | 1523499.015 | 53 | M | Hospitalized injury | Adjusters and calibrators |