Inspection Detail

Inspection: 126692326 - Fujitsu Microelectronics Inc

Inspection Information - Office: Or-E-Portland - Safety 1 1054111

Inspection Nr: 126692326

Report ID: 1054191

Date Opened: 07/21/1995

Site Address:
Fujitsu Microelectronics Inc
21015 Se Stark St
Gresham, OR 97030

Mailing Address:
Ct Corp System 601 Sw 2nd Ave Ste 2100, Portland, OR 97204

Union Status: NonUnion

SIC:3571

NAICS: 0

Inspection Type: Accident

Scope: Partial

Advanced Notice: N

Ownership: Private

Safety/Health: Health

Close Conference: 11/09/1995

Emphasis:

Case Closed: 03/25/1996

Violation Summary
Violations/Penalties	Serious	Willful	Repeat	Other	Unclass	Total
Initial Violations	2					2
Current Violations	2					2
Initial Penalty	$700	$0	$0	$0	$0	$700
Current Penalty	$700	$0	$0	$0	$0	$700
FTA Penalty	$0	$0	$0	$0	$0	$0

Violation Items
#	Citation ID	Citaton Type	Standard Cited	Issuance Date	Abatement Due Date	Current Penalty	Initial Penalty	FTA Penalty	Latest Event
1.	01001A	Serious	19100120 Q03 III	12/04/1995	07/24/1995	$350	$350	$0	-
2.	01001B	Serious	19100120 Q03 IV	12/04/1995	07/24/1995	$0	$0	$0	-
3.	01002	Serious	19100120 Q03 II	12/04/1995	08/23/1995	$350	$350	$0	-

Investigation Summary

Investigation Nr: 170804926

Event: 07/21/1995

Employees exposed to hexamethyldisilazane vapors

In cleanroom Fabrication A (Fab A) at Fujitsu Microelectronics in Gresham, OR, a five gallon pressurized container had been replenished and a purge valve left open on a photoresist machine. The opened purge valve allowed hexamethyldisilazane to overflow into a 2 1/2 gallon waste container equipped with a sensor. The sensor was inoperable and the hexamethyldisilazane flowed onto the grated floor. The grated floor was designed for a laminar air flow and equipped with under the floor ventilation. Some production workers in Fab A immediately started to complain of an odor and irritation to their eyes and respiratory tracts. One production worker left Fab A overcome by hexamethyldisilazane vapors. An Emergency Response Team (ERT) member found the hexamethyldisilazane flowing through the grated floor into Fab A's ventilation system but the ERT did not initiate a Fab A evacuation. However, within a few minutes of the ERT finding the spill, an alarm not associated with hexamethyldisilazane sounded and employees evacuated Fab A. Employees #1 through #17 were sent to local hospitals where they were treated and released.

Keywords: EMERGENCY RESPONSE, INADEQUATE MAINT, WORK RULES, AIR CONTAMINATION, CHEMICAL VAPOR, TOXIC FUMES, HEXAMETHYLDISILAZANE, OVEREXPOSURE, EVACUATION, INATTENTION

Investigated Inspection
#	Inspection	Degree of Injury	Nature of Injury	Occupation
1	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
2	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
3	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
4	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
5	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
6	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
7	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
8	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
9	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
10	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
11	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
12	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
13	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
14	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
15	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
16	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
17	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.

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