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Occupational Safety and Health Administration OSHA

Inspection Detail

Inspection: 106702293 - Memc Electronics Materials

Inspection Information - Office: St. Louis

 

Inspection Nr: 106702293
Report ID: 0729300
Open Date: 03/09/1992

Site Address:
Memc Electronics Materials
501 Pearl Drive
O'Fallon, MO 63376

Mailing Address:
P.O. Box 8, St. Peters, MO 63376

Union Status: NonUnion

SIC:3674

NAICS: 0 


Inspection Type: Accident

Scope: Complete

Advanced Notice: N

Ownership: Private

Safety/Health: Health

Close Conference: 03/12/1992

Emphasis:

Close Case:03/20/1992


Related Activity
Type Activity Nr Safety Health
Accident 360339360

Investigation Summary

Investigation Nr: 14424428
Event: 03/06/1992
Five Employees Inhaled Toxic Fumes From Exhaust Hood

DURING THE NORMAL ETCHING PROCESS OF SILICON WAFERS THE EXHAUST FAN USED TO VENTILATE AN ENCLOSED HOOD STOPPED WORKING. THE HOOD ENCLOSED AN AUTOMATED PROCESS WHERE SILICON DISCS ARE FIRST DIPPED INTO A SOLUTION OF KOH AT 45% AND ABOUT 90 DEGREES C, AND THEN TRANSFERRED TO A 0.5% HCL SOLUTION AT ROOM TEMPERATURE. IT WAS DETERMINED THAT BECAUSE THE BUILDING INTERIOR WAS UNDER NEGATIVE PRESSURE, AND ALSO BECAUSE OF PREVAILING ATMOSPHERIC CONDITIONS, THE EXHAUST DUCT CONTENTS WAS FORCED BACK INTO THE WORK AREA. FIVE EMPLOYEES WERE EXPOSED TO THE KOH VAPOR/MIST. THEY WERE HOSPITALIZED OVERNIGHT AND WERE TREATED WITH OXYGEN. THEY WERE DIAGNOSED WITH UPPER RESPIRATORY IRRITATION AND LUNG CONGESTION. THE FIVE EMPLOYEES ALL RETURNED TO WORK THE FOLLOWING WEEK. AS A RESULT OF THE INCIDENT AN ALARM HAS BEEN PLACED ON THE HOOD, ALTHOUGH NO SUCH ALARM IS REQUIRED BY OSHA. A BACK-UP EXHAUST IS ALSO BEING CONSIDERED.

Keywords:respiratory, lung, ventilation, inhalation, chemical vapor, toxic fumes

Investigated Inspection
# Inspection Age Sex Degree Nature Occupation
1 106702293 Hospitalized injury Other Occupation not reported
2 106702293 Hospitalized injury Other Occupation not reported
3 106702293 Hospitalized injury Other Occupation not reported
4 106702293 Hospitalized injury Other Occupation not reported
5 106702293 Hospitalized injury Other Occupation not reported
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