Accident Report Detail

Accident Summary Nr: 170804926 - Employees exposed to hexamethyldisilazane vapors

Accident Summary Nr: 170804926 -- Report ID: 1054191 -- Event Date: 07/21/1995
Inspection Nr	Date Opened	SIC	NAICS	Establishment Name
126692326	07/21/1995	3571	0	Fujitsu Microelectronics Inc

Abstract: In cleanroom Fabrication A (Fab A) at Fujitsu Microelectronics in Gresham, OR, a five gallon pressurized container had been replenished and a purge valve left open on a photoresist machine. The opened purge valve allowed hexamethyldisilazane to overflow into a 2 1/2 gallon waste container equipped with a sensor. The sensor was inoperable and the hexamethyldisilazane flowed onto the grated floor. The grated floor was designed for a laminar air flow and equipped with under the floor ventilation. Some production workers in Fab A immediately started to complain of an odor and irritation to their eyes and respiratory tracts. One production worker left Fab A overcome by hexamethyldisilazane vapors. An Emergency Response Team (ERT) member found the hexamethyldisilazane flowing through the grated floor into Fab A's ventilation system but the ERT did not initiate a Fab A evacuation. However, within a few minutes of the ERT finding the spill, an alarm not associated with hexamethyldisilazane sounded and employees evacuated Fab A. Employees #1 through #17 were sent to local hospitals where they were treated and released.

Keywords: EMERGENCY RESPONSE, INADEQUATE MAINT, WORK RULES, AIR CONTAMINATION, CHEMICAL VAPOR, TOXIC FUMES, HEXAMETHYLDISILAZANE, OVEREXPOSURE, EVACUATION, INATTENTION

Employee Details
Employee #	Inspection Nr	Degree of Injury	Nature of Injury	Occupation
1	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
2	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
3	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
4	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
5	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
6	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
7	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
8	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
9	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
10	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
11	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
12	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
13	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
14	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
15	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
16	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.
17	126692326	Non Hospitalized injury	Other	Miscellaneous precision workers, n.e.c.

Thank You for Visiting Our Website

You are exiting the Department of Labor's Web server.

The Department of Labor does not endorse, takes no responsibility for, and exercises no control over the linked organization or its views, or contents, nor does it vouch for the accuracy or accessibility of the information contained on the destination server. The Department of Labor also cannot authorize the use of copyrighted materials contained in linked Web sites. Users must request such authorization from the sponsor of the linked Web site. Thank you for visiting our site. Please click the button below to continue.