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Element Compound Formula State Technique
n-type        
Antimony Antimony Trioxide Sb2O3 solid diffusion
  Antimony Trichloride SbCl3 liquid diffusion
Arsenic Arsenic Trioxide As2O3 solid diffusion
  Arsenic Trioxide As2O3
Propanol
Ethyl Acetate
liquid diffusion - spin on
  Arsine AsH3 gas diffusion
ion implantation
  Arsenic Penta-fluoride AsF5 gas ion implantation
Phosphorus Phosphorus Pentoxide P2O5 solid diffusion
  Phosphorus Pentoxide P2O5
solvent
liquid diffusion - spin on
  Phosphorus Tribromide PBr3 liquid diffusion
  Phosphorus Trichloride PCl3 liquid diffusion
  Phosphorus Oxychloride POCl3 liquid diffusion
  Phosphine PH3 gas diffusion
ion implantation
  Phosphorus Pentafluoride PF5 gas ion implantation
p-type        
Boron Boron Trioxide B2O3 solid diffusion
  Boron Nitride BN solid diffusion
  Boron Tribromide BBr3
Glycol ether
liquid diffusion
  Boron Trioxide B2O3 liquid diffusion - spin on
  Triethylborate B(COC2H5)3 liquid diffusion - spin on
  Silicon Tetrabromide SiBr4 liquid diffusion
  Boron Trichloride BCl3 liquid diffusion
ion implantation
  Boron Trifluoride BF3 gas ion implantation
  Diborane B2H6 gas diffusion
ion implantation