|Polysilicon (Si) and Silicon||CF + O2, CCL3 or CF3Cl, CF4 and HCl|
|Silicon Dioxide (SiO2)||C2F6, C3F8, CF4, SiF4, C5F12, CHF3,
CCl2F2, SF6, HF
|Silicon Nitride (Si3N4)||CF4 + Ar, CF4 + O2, CF4 + H2|
|Aluminum (Al)||CCl4 or BCl3 + He or Ar|
|Chromium Oxide (CrO3)||Cl2 + Ar or CCl4 + Ar|
|Gallium Arsenide (GaAs)||CCl2F2|
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