Occupational Safety and Health Administration OSHA

Ingot Growing

Charge Preparation

A long cylindrical quartz ampoule is loaded with elemental arsenic in chunk form in a locally exhausted laminar flow hood. A smaller quartz boat is charged with liquid gallium, dopant, and a small GaAs single-crystal seed. The quartz boat is then loaded into the other section of the quartz ampoule already containing the elemental arsenic.

The following are potential hazards for charge preparation.

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