An initial aluminum evaporation is performed utilizing an e-beam evaporator. After backlapping (see below), gold evaporation is performed using a filament evaporator. (See Silicon Device Manufacturing - Metallization)
The following are potential hazards of metallization.
Metals and Solvents
- Possible employee exposure to metals and solvents during evaporator cleaning, bell jar cleaning, and maintenance operations. Typical metal exposures include gold and silver. Methanol is a popular cleaning solvent.
- See Possible Solutions: Solvents
- Substitution of water for methanol as a cleaning solvent, when feasible.
- Toxic Metals. OSHA Safety and Health Topics Page.