Occupational Safety and Health Administration OSHA

Device Fabrication


An initial aluminum evaporation is performed utilizing an e-beam evaporator. After backlapping (see below), gold evaporation is performed using a filament evaporator. (See Silicon Device Manufacturing - Metallization)

The following are potential hazards of metallization.

Metals and Solvents

Potential Hazard

  • Possible employee exposure to metals and solvents during evaporator cleaning, bell jar cleaning, and maintenance operations. Typical metal exposures include gold and silver. Methanol is a popular cleaning solvent.

Possible Solutions

Additional Information

Back to Top

Thank You for Visiting Our Website

You are exiting the Department of Labor's Web server.

The Department of Labor does not endorse, takes no responsibility for, and exercises no control over the linked organization or its views, or contents, nor does it vouch for the accuracy or accessibility of the information contained on the destination server. The Department of Labor also cannot authorize the use of copyrighted materials contained in linked Web sites. Users must request such authorization from the sponsor of the linked Web site. Thank you for visiting our site. Please click the button below to continue.