SILICON TETRAHYDRIDE

Chemical Identification
Chemical Identification
CAS # 7803-62-5
Formula

SiH₄

Synonyms

monosilane; silane; silicane

Physical Properties
Physical Properties
Physical description Colorless gas with a repulsive odor.
Boiling point -169°F Molecular weight 32.1
Freezing point/melting point -301°F Vapor pressure >1 atm
Flash point Vapor density 1.11
Specific gravity Ionization potential
Lower explosive limit (LEL) Upper explosive limit (UEL)
NFPA health rating 1 NFPA fire rating 4
NFPA reactivity rating 3 NFPA special instruction
Vapor hazard ratio (VHR)
Historical exceedance percentage
Target organs
Monitoring Methods Used by OSHA
Monitoring Methods Used by OSHA
Analyte code (IMIS no.)
Sampling group
Sampler/Sampling media
Sampling time*
Sampling volume (TWA)*
Sampling flow rate (TWA)*
Sampling volume (STEL/Peak/C)*
Sampling flow rate (STEL/Peak/C)*
Analytical method instruments
Method reference
Notes
Special requirements

* All sampling instructions above are recommended guidelines for OSHA Compliance Safety and Health Officers (CSHOs), please see the corresponding OSHA method reference for complete details.

Wipe Method
Wipe Method
Sampler/Sampling media
Bulk Method
Bulk Method
On-Site Screening Techniques
On-Site Screening Techniques
Device
Model/Type
Sampling information
(see manufacturer instructions)
Exposure Limits
Exposure Limits
OSHA PEL
8-hour TWA
(ST) STEL
(C) Ceiling
Peak
NIOSH REL
Up to 10-hour TWA
(ST) STEL
(C) Ceiling
ACGIH TLV©
8-hour TWA
(ST) STEL
(C) Ceiling
CAL/OSHA PEL
8-hour TWA
(ST) STEL
(C) Ceiling
Peak
PEL-TWA REL-TWA

5 ppm (7 mg/m³)

TLV-TWA

5 ppm [2014]

PEL-TWA

5 ppm (7 mg/m³)

PEL-STEL REL-STEL TLV-STEL PEL-STEL
PEL-C REL-C TLV-C PEL-C
Skin notation

NA

Skin notation

N

Skin notation

N

Skin notation

N

Notes:

Not established

Notes: Notes: Notes:
Health factors:  See NIH-NLM PubChem. IDLH
Carcinogenic classifications: Not listed Notes:
AIHA emergency response planning guidelines - ERPG-1/ERPG-2/ERPG-3:
Additional Resources and Literature References
Additional Resources and Literature References

NOAA: CAMEO Chemicals - Silane

NIOSH: Pocket Guide to Chemical Hazards - Silicon tetrahydride

Literature References

  • ACGIH: Documentation of the Threshold Limit Values (TLVs) and Biological Exposure Indices (BEIs) - Silicon tetrahydride. See annual publication for most recent information.

Last Updated Date : 01/12/2021