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Safety and Health Topics > Semiconductors > Gallium Arsenide > Device Fabrication: Metallization Device Fabrication: Metallization An initial aluminum evaporation is performed utilizing an e-beam evaporator. After backlapping (see below), gold evaporation is performed using a filament evaporator. (See Silicon Device Manufacturing - Metallization) Potential Hazards X-ray Radiation Metals and Solvents Metals and Solvents Potential Hazard Possible employee exposure to metals and solvents during evaporator cleaning, bell jar cleaning, and maintenance operations. Typical metal exposures include gold and silver. Methanol is a popular cleaning solvent. Possible Solutions See the Possible Solutions: Solvents page. Substitution of water for methanol as a cleaning solvent, when feasible. Additional Information Toxic Metals. OSHA Safety and Health Topic page.

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