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Occupational Safety and Health Administration OSHA

Accident Report Detail

Accident: 170804926 - Employees Exposed To Hexamethyldisilazane Vapors

Accident: 170804926 -- Report ID: 1054191 -- Event Date: 07/21/1995
InspectionOpen DateSICEstablishment Name
12669232607/21/19953571Fujitsu Microelectronics Inc
In cleanroom Fabrication A (Fab A) at Fujitsu Microelectronics in Gresham, OR, a five gallon pressurized container had been replenished and a purge valve left open on a photoresist machine. The opened purge valve allowed hexamethyldisilazane to overflow into a 2 1/2 gallon waste container equipped with a sensor. The sensor was inoperable and the hexamethyldisilazane flowed onto the grated floor. The grated floor was designed for a laminar air flow and equipped with under the floor ventilation. Some production workers in Fab A immediately started to complain of an odor and irritation to their eyes and respiratory tracts. One production worker left Fab A overcome by hexamethyldisilazane vapors. An Emergency Response Team (ERT) member found the hexamethyldisilazane flowing through the grated floor into Fab A's ventilation system but the ERT did not initiate a Fab A evacuation. However, within a few minutes of the ERT finding the spill, an alarm not associated with hexamethyldisilazane sounded and employees evacuated Fab A. Employees #1 through #17 were sent to local hospitals where they were treated and released.
Keywords: emergency response, inadequate maint, work rules, air contamination, chemical vapor, toxic fumes, hexamethyldisilazane, overexposure, evacuation, inattention
Employee # Inspection Age Sex Degree Nature Occupation
1 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
2 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
3 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
4 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
5 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
6 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
7 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
8 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
9 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
10 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
11 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
12 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
13 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
14 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
15 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
16 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.
17 126692326 Non Hospitalized injury Other Miscellaneous precision workers, n.e.c.

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