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Chemical Sampling Information
Silicon Tetrahydride
 Field Definitions
 Analytical Methods
 Health Guidelines
General Description

NAME: Silicon Tetrahydride

SYNONYM(s): Silane

IMIS: 2237

CAS: 7803-62-5

DESCRIPTION:

Gas.

Exposure Limits

ACGIH TLV: 5 ppm, 6.6 mg/m3 TWA

NIOSH REL: 5 ppm TWA

Health Factors

HEALTH EFFECTS: Acute Systemic Toxicity (Analogy with other metal hydrides) (HE4)

Monitoring

PRIMARY SAMPLING/ANALYTICAL METHOD (SLC1):



MEDIA: Midget Fritted Glass Bubbler (MFGB) containing 15 mL 0.01 N+ KOH
MAX V: 480 Liters   MAX F: 1.0 L/min
ANL 1: Atomic Absorption Spectroscopy; AAS/GF
REF: 2 (OSHA In-house file)
CLASS: Not Validated
NOTE: Submit as a separate sample. Analysis is performed for total Silicon and reported as the compound. Samples should be stored and shipped in plastic as soon after sampling as possible. Keep blank solution in MFGB for the same time period as samples.

WIPE:

No


Revision Date: 01/15/1993
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