NAME: Silicon Tetrahydride
SYNONYM(s):
Silane
IMIS: 2237
CAS: 7803-62-5
DESCRIPTION:
Gas.
Exposure Limits
ACGIH TLV:
5 ppm, 6.6 mg/m3 TWA
NIOSH REL: 5 ppm TWA
Health Factors
HEALTH EFFECTS:
Acute Systemic Toxicity (Analogy with other metal hydrides) (HE4)
Monitoring
PRIMARY SAMPLING/ANALYTICAL METHOD (SLC1):
MEDIA:
Midget Fritted Glass Bubbler (MFGB) containing 15 mL 0.01 N+ KOH
MAX V:
480 Liters MAX F:
1.0 L/min
ANL 1:
Atomic Absorption Spectroscopy; AAS/GF
REF:
2 (OSHA In-house file)
CLASS:
Not Validated
NOTE:
Submit as a separate sample. Analysis is performed for total Silicon and reported as the compound. Samples should be stored and shipped in plastic as soon after sampling as possible. Keep blank solution in MFGB for the same time period as samples.
WIPE:
No
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