Safety and Health Topics > Semiconductors > Silicon
> Metallization: Photolithography
Metallization:
Photolithography
Similar photolithographic techniques that are used during device
fabrication are used to deposit conductive patterns during metallization. In one technique, the metal is
deposited then covered with a patterned photoresist, and subsequently etched. In another method the resist is
applied first, followed by deposition of the metal. The wafer is then placed in a solvent that causes swelling of
the resist. As the resist swells it lifts the overlaid metal away from the wafer surface.
Potential Hazards
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Photoresist Chemicals |
Potential Hazard
- Possible employee exposure to photoresist chemicals.
Possible Solutions
- Identify chemical hazards and perform appropriate exposure
evaluations.
- Perform exposure measurements for the chemicals used.
- See 1910.1000,
Table
Z-1, which contains permissible exposure limits for various chemicals.
- Address all dermal exposures.
- Provide appropriate ventilation to reduce chemical concentration levels in the air.
- Provide PPE [1910 Subpart I]
as appropriate to prevent eye and skin contact.
- Use respiratory protection [1910.134] when necessary to further reduce exposure and protect employees.
- Design and use specialized processing,
material handling, and storage equipment to properly contain chemicals. Consider both normal use and emergency scenarios.
- Install emergency facilities to provide immediate treatment in the event of an
accidental exposure to corrosive materials. According to 1910.151, provide suitable facilities for quick drenching or flushing of the
eyes and body for immediate emergency use
whenever the eyes or body may be exposed to corrosive
materials.
Additional Information
OSHA Safety and Health Topic pages:
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Flammable Liquids, Fire |
Potential Hazard
- Possible ignition of flammable liquids resulting in fire and/or explosion.
Employees may also be exposed to vapors above permissible limits.
Possible Solutions
- Identify and eliminate possible ignition sources. Use a Process Hazard Analysis (PHA) for identifying and controlling such
hazards.
- Provide appropriate ventilation to reduce vapor concentration levels in the air.
- Use respiratory protection [1910.134] when necessary to further reduce exposure and protect employees.
- Use appropriate material handling and storage equipment designed for use
with flammable liquids.
Additional Information
OSHA Safety and Health Topic pages:
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