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Safety and Health Topics > Semiconductors > Gallium Arsenide > Wafer Processing: Ingot Evaluation...

Wafer Processing: Ingot Evaluation and Machining
As in silicon ingot processing, the crystalline structure of the GaAs ingot is determined by the use of an x-ray diffraction unit. The ends of the single-crystal ingot are then cropped using a water-lubricated single-bladed diamond saw, with various coolants added to the water.

Potential Hazards
Arsenic
Potential Hazard
  • Possible employee exposure to gallium arsenide (arsenic). The GaAs slurry presents a considerable dermal hazard, and there is potential for an airborne hazard if the slurry becomes dry.
Possible Solutions

 
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