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U.S. Department of Labor |
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| Occupational Safety & Health Administration | ||||||
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| Safety and Health
Topics
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Semiconductors
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Gallium Arsenide
> Ingot Growing: Charge Preparation
Ingot Growing: Charge Preparation A long cylindrical quartz ampoule is loaded with elemental arsenic in chunk form in a locally exhausted laminar flow hood. A smaller quartz boat is charged with liquid gallium, dopant, and a small GaAs single-crystal seed. The quartz boat is then loaded into the other section of the quartz ampoule already containing the elemental arsenic. Potential Hazards |
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