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Safety and Health Topics > Semiconductors > Silicon > Device Fabrication: Soft Bake Device Fabrication: Soft Bake After photoresist application, the wafers are "soft baked" by placing them in an oven at moderate temperatures around 70-90ºC. This soft bake causes the photoresist to cure and the remaining solvents to evaporate. Potential Hazards Toxic Exhaust Gases Thermal Burns

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