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U.S. Department of Labor | |
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| Occupational Safety & Health Administration | ||||||
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| Safety and Health Topics > Semiconductors > Silicon
> Device Fabrication: Hard Bake
Device Fabrication: Hard Bake 
After developing an
additional baking process or "hard bake" is performed to harden the
remaining photoresist to a finish much like the enamel on an automobile.
The photoresist is then ready to protect the underlying SiO2
during etching.
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