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Safety and Health Topics > Semiconductors > Silicon > Device Fabrication: Hard Bake Device Fabrication: Hard Bake After developing an additional baking process or "hard bake" is performed to harden the remaining photoresist to a finish much like the enamel on an automobile. The photoresist is then ready to protect the underlying SiO2 during etching. Potential Hazards Toxic Exhaust Gases Thermal Burns

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